Short Course Description
Principles of microelectro-mechanical sensing and operation: acoustic transducers, thermometers (piezoelectric materials, diffusers), chemists. Micro-sensors and actuators for acceleration, pressure, optical, and biological applications, including micro-channels, pumps, and valves.
Operation and fabrication principles in the field of micro-electro-mechanical systems: materials in miniaturization technologies (silicon, glass, plastic, PDMS), lithography methods (optical, Ebeam, soft-lithography), evaporation and etching methods (dry and chemical), three-dimensional structure production processes, Modification and characterization of surface properties.
Full Syllabus